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a Generic process flow of the system-level optimization system based on a GA. b Schematic view of the parameterized system-level model comprising (i) a mechanical ROM implemented in MEMS + ® , (ii) an electronic model implemented in Simulink. c Schematic view of a fully parameterized AMPACC model and its ROM, including anchors, a proof mass, levers (Arm A, input beams, pivot beams, output beams), output comb fingers and anchors. The sensing direction is along the y-axis. d Pivot-input beam area. Freeform beam model defined by parameters denoted in red and blue in Table

Journal: Microsystems & Nanoengineering

Article Title: A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm

doi: 10.1038/s41378-025-00910-w

Figure Lengend Snippet: a Generic process flow of the system-level optimization system based on a GA. b Schematic view of the parameterized system-level model comprising (i) a mechanical ROM implemented in MEMS + ® , (ii) an electronic model implemented in Simulink. c Schematic view of a fully parameterized AMPACC model and its ROM, including anchors, a proof mass, levers (Arm A, input beams, pivot beams, output beams), output comb fingers and anchors. The sensing direction is along the y-axis. d Pivot-input beam area. Freeform beam model defined by parameters denoted in red and blue in Table

Article Snippet: In the parametrized system-level model, the mechanical ROM is implemented with Coventor MEMS + ® and an electronic model is implemented in Simulink The first step is to build a fully parameterized system-level model, as shown in Fig. , which comprises an electronic model implemented in Simulink and a mechanical ROM implemented in MEMS + .

Techniques: